Basic integrated circuit manufacturing processes; electronics devices fundamentals; microelectromechanical systems fabrications including surface micromachining, bulk micromachining, and lithography; introduction to micro-actuators and microsensors such as micromotors, grippers, accelerometers and pressure sensors; physics of MEMS, scaling law, heat transfer, mechanics, electrostatics; introduction to micro-fluid systems; mechanical and electrical issues in micromachining; packaging techniques; CAD tools to design microelectromechanical structures.
Prerequisite: ENGE 380
